Ball Valves
3-Piece Full-Bore Ball Valve – Threaded, Socket-Weld or Butt-Weld
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Butterfly Valves
Industrial Valves & Automated Actuation
Butterfly Valves
High-Vacuum ISO-KF Butterfly Valve for Semiconductor Systems
High Vacuum Butterfly Valve. ISO-KF16 to ISO-KF50 | Atmospheric to 1 x 10⁻⁸ mbar | ISO-KF Vacuum Flanged.
Quick Specifications
Type
High Vacuum Butterfly Valve
Size
ISO-KF16 to ISO-KF50
Body / Seal Materials
304 / 316L Stainless Steel; FKM seal (Viton® optional)
Pressure
Atmospheric to 1 x 10⁻⁸ mbar
Connection
ISO-KF Vacuum Flanged
Temperature
-20 to 150°C
Product Overview
A compact high vacuum butterfly valve for semiconductor, laboratory vacuum, thin-film coating and analytical equipment. Its stainless-steel body and ISO-KF quick-clamp flange connections provide a clean, low-dead-volume flow path, while the elastomer-sealed butterfly disc gives fast isolation from atmospheric pressure to high-vacuum service. Manual lever, pneumatic actuator, position switch and selected 304 or 316L materials are available. This vacuum-specific flange and compact clean construction create a distinct product category from pipeline and bulk-solids butterfly valves.
